CAPACITIVE BASED CMOS-MEMS MICROACTUATOR FOR BIOMEDICAL APPLICATION

• المؤلف الرئيسي: Samuri, Marfarahain
• التنسيق: Final Year Project
• اللغة: English
• منشور في: Universiti Teknologi PETRONAS 2011
• الموضوعات: TK Electrical engineering. Electronics Nuclear engineering
• الوصول للمادة أونلاين: http://utpedia.utp.edu.my/10310/1/2011%20Bachelor%20-%20Capacitive%20Based%20CMOS-MEMS%20Microactuator%20For%20Biomedical%20Application.pdf; http://utpedia.utp.edu.my/10310/

The purpose of this project is to design electrostatic microacluator for biomedical application using CMOS and MEMS. The technology of microelectromechanical system (MEMS) is widely used in many daily applications such as aerospace Microsystems, biomedical applications, consumer electronic devic...