Optimization of a CMOS-MEMS Resonator for Applications of Relative Humidity Measurement

• المؤلف الرئيسي: FADLALLA, MOHAMED AHMED ELTAYEB
• التنسيق: Final Year Project
• اللغة: English
• منشور في: Universiti Teknologi PETRONAS 2017
• الموضوعات: TK Electrical engineering. Electronics Nuclear engineering
• الوصول للمادة أونلاين: http://utpedia.utp.edu.my/22962/1/FINAL%20DISSERTATION.pdf; http://utpedia.utp.edu.my/22962/

The mathematical modeling and the finite element analysis (FEA) of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) resonator has been presented. The resonator is designed based on 0.35 µm CMOS foundry fabrication technology. The sensing principle of the resonat...