Characterization of electroplated permalloy film on microstructure for Bio-MEMS application

• Main Authors: Abdul Rani, Nabila Syafiqa, Ibrahim, Siti Noorjannah, Zahangir, Musanna, Abdul Malik, Noreha
• 格式: Conference or Workshop Item
• 语言: English; English
• 出版: Institute of Electrical and Electronics Engineers Inc. 2019
• 主题: TK Electrical engineering. Electronics Nuclear engineering
• 在线阅读: http://irep.iium.edu.my/79703/13/79703_Characterization%20of%20Electroplated%20Permalloy%20Film%20_baru.pdf; http://irep.iium.edu.my/79703/2/79703_Characterization%20of%20Electroplated_scopus.pdf; http://irep.iium.edu.my/79703/; https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8943517

Thick films (approximately 120microns) of microstructure permalloy were electrodeposited by a direct DC electroplating process for 3 hours. The bath contained mixed baths of sulfate and chloride, a buffer and a stress reducing agents. The bath pH was 3.3 . The voltage and current value were con...