Structural ordering, morphology and optical properties of amorphous AlxIn1-xN thin films grown by plasma-assisted dual source reactive evaporation

• Main Authors: Alizadeh, M., Ganesh, V., Mehdipour, H., Nazarudin, N.F.F., Goh, B.T., Shuhaimi, A., Rahman, S.A.
• 格式: Article
• 出版: Elsevier 2015
• 主題: Q Science (General)
• 在線閱讀: http://eprints.um.edu.my/13250/

Amorphous aluminum indium nitride (AlxIn1-xN) thin films were deposited on quartz substrates by plasma-assisted dual source reactive evaporation system. In-rich (x = 0.10 and 0.18) and Al-rich (x = 0.60 and 0.64) films were prepared by simply varying an AC voltage applied to indium wire. The X-ray-d...