Simulation study of convex corner undercutting in KOH and TMAH for a MEMS piezoresistive accelerometer

• 主要な著者: Yusof, N., Soin, N., Noorakma, A.C.W.
• フォーマット: 論文
• 出版事項: Penerbit UTM Press 2016
• 主題: TK Electrical engineering. Electronics Nuclear engineering
• オンライン･アクセス: http://eprints.um.edu.my/18741/; http://dx.doi.org/10.11113/jt.v78.4914

Undercutting is a common problem in wet anisotropic etching. This problem in turn, influences the performance and sensitivity of MEMS devices. This paper investigates the use of corner compensation to prevent convex corner undercutting in a MEMS piezoresistive accelerometer. The Intellisuite CAD sim...