Hamzah, A. (2017). HF etching of sacrificial spin-on glass in straight and junctioned microchannels for MEMS microstructure release.
シカゴスタイル引用形Hamzah, A.A. HF Etching of Sacrificial Spin-on Glass in Straight and Junctioned Microchannels for MEMS Microstructure Release. 2017.
MLA引用形式Hamzah, A.A. HF Etching of Sacrificial Spin-on Glass in Straight and Junctioned Microchannels for MEMS Microstructure Release. 2017.
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