Ahmad, F. (2011). Theoretical Analysis of Resonant Lateral Electrostatic Comb drive Actuator and Sensor.
シカゴスタイル引用形Ahmad, Farooq. Theoretical Analysis of Resonant Lateral Electrostatic Comb Drive Actuator and Sensor. 2011.
MLA引用形式Ahmad, Farooq. Theoretical Analysis of Resonant Lateral Electrostatic Comb Drive Actuator and Sensor. 2011.
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