CAPACITIVE BASED CMOS-MEMS MICROACTUATOR FOR BIOMEDICAL APPLICATION

• 主要作者: Samuri, Marfarahain
• 格式: Final Year Project
• 語言: English
• 出版: Universiti Teknologi PETRONAS 2011
• 主題: TK Electrical engineering. Electronics Nuclear engineering
• 在線閱讀: http://utpedia.utp.edu.my/10310/1/2011%20Bachelor%20-%20Capacitive%20Based%20CMOS-MEMS%20Microactuator%20For%20Biomedical%20Application.pdf; http://utpedia.utp.edu.my/10310/

The purpose of this project is to design electrostatic microacluator for biomedical application using CMOS and MEMS. The technology of microelectromechanical system (MEMS) is widely used in many daily applications such as aerospace Microsystems, biomedical applications, consumer electronic devic...