CAPACITIVE BASED CMOS-MEMS MICROACTUATOR FOR BIOMEDICAL APPLICATION

• 第一著者: Samuri, Marfarahain
• フォーマット: Final Year Project
• 言語: English
• 出版事項: Universiti Teknologi PETRONAS 2011
• 主題: TK Electrical engineering. Electronics Nuclear engineering
• オンライン･アクセス: http://utpedia.utp.edu.my/10310/1/2011%20Bachelor%20-%20Capacitive%20Based%20CMOS-MEMS%20Microactuator%20For%20Biomedical%20Application.pdf; http://utpedia.utp.edu.my/10310/

The purpose of this project is to design electrostatic microacluator for biomedical application using CMOS and MEMS. The technology of microelectromechanical system (MEMS) is widely used in many daily applications such as aerospace Microsystems, biomedical applications, consumer electronic devic...