Making a commercial atomic force microscope more accurate and faster using positive position feedback control
This paper presents experimental implementation of a positive position feedback (PPF) control scheme for vibration and cross-coupling compensation of a piezoelectric tube scanner in a commercial atomic force microscope (AFM). The AFM is a device capable of generating images with extremely high resol...
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| 格式: | Article |
| 語言: | English |
| 出版: |
American Institute of Physics (AIP)
2009
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| 在線閱讀: | http://irep.iium.edu.my/5202/1/Making_a_commercial_atomic_force_microscope_more_accurate_and_faster_using_positive_position_feedback_control.pdf http://irep.iium.edu.my/5202/ http://rsi.aip.org/resource/1/rsinak/v80/i6/p063705_s1?isAuthorized=no http://link.aip.org/link/doi/10.1063/1.3155790 |
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