Enhanced Electrothermal Analysis for Acetone Gas Detection Based on PolyMUMPs MEMS Sensor

• 主要な著者: Algamili, Abdullah S., Abidin, Zamri Zainal, Khir, Mohd Haris Bin Md., Ahmed, Abdelaziz Yousif, Hashwan, Saeed S. Ba, Isyaku, Usman Bature, Al-Dhawi, Bakr Naser, Salem, Ali Ahmed
• フォーマット: 論文
• 出版事項: Institute of Electrical and Electronics Engineers 2024
• 主題: QC Physics; TK Electrical engineering. Electronics Nuclear engineering
• オンライン･アクセス: http://eprints.um.edu.my/45837/; https://doi.org/10.1109/ACCESS.2024.3365191

Environmental monitoring for the detection and regulation of toxic gases is of paramount importance. This study proposes the modeling and fabrication of MEMS devices based on the standard Polysilicon Multi-Users MEMS Process (PolyMUMPs) for acetone gas detection. Titanium dioxide ( TiO2 ) nanopartic...