Effects of Substrate Temperature on the Properties of Indium Nitride Thin Films Grown on Flexible Prepared by Reactive Sputtering Method

• Main Authors: Osman, Siti Aisyah, Lee, Zhi Yin, Fong, Chee Yong, Ng, Sha Shiong
• 格式: Conference or Workshop Item
• 語言: English
• 出版: 2015
• 主題: QC1-999 Physics
• 在線閱讀: http://eprints.usm.my/48735/1/Section%20C%20157-2.pdf%20cut.pdf; http://eprints.usm.my/48735/

In this study, indium nitride (InN) thin films were deposited on kapton polymide flexible substrate by reactive radio frequency (RF) sputtering method using indium target in a mixture of Ar and N2 gases. The InN thin films were deposited under different substrate temperatures, i.e., 1 00°C and 20...