Modeling of ANFIS in predicting TiN coatings roughness

• 主要な著者: Jaya, A. S. M., Hashim, S.Z.M., Haron, H., Ngah, Razali, Muhamad, M.R., Rahman, M. N. A.
• フォーマット: Conference or Workshop Item
• 言語: English
• 出版事項: 2013
• 主題: QA75 Electronic computers. Computer science
• オンライン･アクセス: http://eprints.utem.edu.my/id/eprint/10672/1/Modeling_of_ANFIS_in_Predicting_TiN_Coatings_Roughness.pdf; http://eprints.utem.edu.my/id/eprint/10672/; http://ieeexplore.ieee.org/

In this paper, an approach in predicting surface roughness of Titanium Aluminum Nitrite (TiN) coatings using Adaptive Network Based Fuzzy Inference System (ANFIS) is implemented. The TiN coatings were coated on tungsten carbide(WC) using Physical Vapor Deposition (PVD) magnetron sputtering process....