Convolutional neural network for imbalanced data classification of silicon wafer defects

• Main Authors: Batool, Uzma, Shapiai, Mohd. Ibrahim, Fauzi, Hilman, Fong, Jia Xian
• 格式: Conference or Workshop Item
• 出版: 2020
• 主题: TK Electrical engineering. Electronics Nuclear engineering
• 在线阅读: http://eprints.utm.my/id/eprint/92436/; http://dx.doi.org/10.1109/CSPA48992.2020.9068669

Integrated circuit chip fabrication may induce defects on silicon wafers due to inadequate manufacturing environment, equipment malfunctioning and operational flaws. An identification and analysis of these defects facilitates the process engineering by backtracking and addressing their causes of gen...