Convolutional neural network for imbalanced data classification of silicon wafer defects

• المؤلفون الرئيسيون: Batool, Uzma, Shapiai, Mohd. Ibrahim, Fauzi, Hilman, Fong, Jia Xian
• التنسيق: Conference or Workshop Item
• منشور في: 2020
• الموضوعات: TK Electrical engineering. Electronics Nuclear engineering
• الوصول للمادة أونلاين: http://eprints.utm.my/id/eprint/92436/; http://dx.doi.org/10.1109/CSPA48992.2020.9068669

Integrated circuit chip fabrication may induce defects on silicon wafers due to inadequate manufacturing environment, equipment malfunctioning and operational flaws. An identification and analysis of these defects facilitates the process engineering by backtracking and addressing their causes of gen...