Convolutional neural network for imbalanced data classification of silicon wafer defects

• 主要な著者: Batool, Uzma, Shapiai, Mohd. Ibrahim, Fauzi, Hilman, Fong, Jia Xian
• フォーマット: Conference or Workshop Item
• 出版事項: 2020
• 主題: TK Electrical engineering. Electronics Nuclear engineering
• オンライン･アクセス: http://eprints.utm.my/id/eprint/92436/; http://dx.doi.org/10.1109/CSPA48992.2020.9068669

Integrated circuit chip fabrication may induce defects on silicon wafers due to inadequate manufacturing environment, equipment malfunctioning and operational flaws. An identification and analysis of these defects facilitates the process engineering by backtracking and addressing their causes of gen...