Electrothermal Analysis of a MetalMUMPs Device for Acetone Detection

• Main Authors: Ahmed, A.Y., Khir, M.H.M., Dennis, J.O., Rabih, A.A.S.
• 格式: Conference or Workshop Item
• 出版: Institute of Electrical and Electronics Engineers Inc. 2019
• 在线阅读: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85078313011&doi=10.1109%2fRSM46715.2019.8943549&partnerID=40&md5=cdbb957e2b93025c122ef84df7624477; http://eprints.utp.edu.my/23592/

Acetone is used extensively in workplaces, and hence detection of acetone leak is important to avoid its health and safety risks. Acetone concentration (>176 parts per million (ppm)) acetone in air is also toxic and can cause damage to human vital organs. The most common used sensors for acetone...