Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing
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| Main Authors: | , , , , |
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| 格式: | Article |
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Research India Publications
2016
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| 在線閱讀: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963670575&partnerID=40&md5=ef3a4ae88ae1886424d44a22e7b3eacf http://eprints.utp.edu.my/24297/ |
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