Theoretical Analysis of Resonant Lateral Electrostatic Comb drive Actuator and Sensor

• 主要な著者: Ahmad, Farooq, Dennis, John Ojur, Md Khir, Mohd Haris, Hamid, Nor Hisham
• フォーマット: Conference or Workshop Item
• 出版事項: 2011
• 主題: TK Electrical engineering. Electronics Nuclear engineering
• オンライン･アクセス: http://ieeexplore.ieee.org; http://eprints.utp.edu.my/6969/

This paper investigates the electrostatic drive, sense, spring behavior of long beams, resonant frequency, quality factor, resonator noise and damping of resonator parallel to the substrate, using an interdigitated capacitor (electrostatic comb). Resonant frequency of the device is 9.5 kHz with qual...