A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing

This paper is about CMOS MEMS resonant magnetic field sensor in which differential electrostatic actuation, capacitive sensing, resonant frequency, quality factor and sensitivity of interdigitated comb resonator is investigated. Information is embedded in the output signal frequency because it is...

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Main Authors: Ahmad, Farooq, Dennis, John Ojur, Md Khir, Mohd Haris, Hamid, Nor Hisham
格式: Article
出版: Trans Tech Publications, Switzerland 2012
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在线阅读:http://eprints.utp.edu.my/8784/1/FAROOQ_%28AMR%29.pdf
http://www.scientific.net
http://eprints.utp.edu.my/8784/
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