A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing

• Main Authors: Ahmad, Farooq, Dennis, John Ojur, Md Khir, Mohd Haris, Hamid, Nor Hisham
• 格式: Conference or Workshop Item
• 出版: 2011
• 主题: TK Electrical engineering. Electronics Nuclear engineering
• 在线阅读: http://eprints.utp.edu.my/6970/1/ICMENS_Camera_ready.pdf; http://eprints.utp.edu.my/6970/

This paper is about CMOS MEMS resonant magnetic field sensor in which differential electrostatic actuation, capacitive sensing, resonant frequency, quality factor and sensitivity of interdigitated comb resonator is investigated. Information is embedded in the output signal frequency because it is ro...