A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing
This paper is about CMOS MEMS resonant magnetic field sensor in which differential electrostatic actuation, capacitive sensing, resonant frequency, quality factor and sensitivity of interdigitated comb resonator is investigated. Information is embedded in the output signal frequency because it is...
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Trans Tech Publications, Switzerland
2012
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my.utp.eprints.87842013-01-16T02:07:54Z A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing Ahmad, Farooq Dennis, John Ojur Md Khir, Mohd Haris Hamid, Nor Hisham TK Electrical engineering. Electronics Nuclear engineering This paper is about CMOS MEMS resonant magnetic field sensor in which differential electrostatic actuation, capacitive sensing, resonant frequency, quality factor and sensitivity of interdigitated comb resonator is investigated. Information is embedded in the output signal frequency because it is robust against the interference from other sources during transmission. At damping ratio of 0.0001, resonant frequency of the comb resonator is 4.35 kHz with quality factor 5000 and amplitude 18.45 μm. Sensitivity of the device towards external magnetic field is 9.455 mHz/nT which is 10,000 times improved than recently published data. Trans Tech Publications, Switzerland 2012-01 Article PeerReviewed application/pdf http://eprints.utp.edu.my/8784/1/FAROOQ_%28AMR%29.pdf http://www.scientific.net Ahmad, Farooq and Dennis, John Ojur and Md Khir, Mohd Haris and Hamid, Nor Hisham (2012) A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing. Advanced Materials Research, 403-40 . pp. 4205-4209. ISSN 1662-8985 http://eprints.utp.edu.my/8784/ |
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TK Electrical engineering. Electronics Nuclear engineering Ahmad, Farooq Dennis, John Ojur Md Khir, Mohd Haris Hamid, Nor Hisham A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing |
| description |
This paper is about CMOS MEMS resonant magnetic field sensor in which differential
electrostatic actuation, capacitive sensing, resonant frequency, quality factor and sensitivity of
interdigitated comb resonator is investigated. Information is embedded in the output signal frequency because it is robust against the interference from other sources during transmission. At damping ratio of 0.0001, resonant frequency of the comb resonator is 4.35 kHz with quality factor 5000 and amplitude 18.45 μm. Sensitivity of the device towards external magnetic field is 9.455 mHz/nT which is 10,000 times improved than recently published data. |
| format |
Article |
| author |
Ahmad, Farooq Dennis, John Ojur Md Khir, Mohd Haris Hamid, Nor Hisham |
| author_facet |
Ahmad, Farooq Dennis, John Ojur Md Khir, Mohd Haris Hamid, Nor Hisham |
| author_sort |
Ahmad, Farooq |
| title |
A CMOS MEMS Resonant Magnetic field Sensor with differential
Electrostatic actuation and Capacitive sensing |
| title_short |
A CMOS MEMS Resonant Magnetic field Sensor with differential
Electrostatic actuation and Capacitive sensing |
| title_full |
A CMOS MEMS Resonant Magnetic field Sensor with differential
Electrostatic actuation and Capacitive sensing |
| title_fullStr |
A CMOS MEMS Resonant Magnetic field Sensor with differential
Electrostatic actuation and Capacitive sensing |
| title_full_unstemmed |
A CMOS MEMS Resonant Magnetic field Sensor with differential
Electrostatic actuation and Capacitive sensing |
| title_sort |
cmos mems resonant magnetic field sensor with differential
electrostatic actuation and capacitive sensing |
| publisher |
Trans Tech Publications, Switzerland |
| publishDate |
2012 |
| url |
http://eprints.utp.edu.my/8784/1/FAROOQ_%28AMR%29.pdf http://www.scientific.net http://eprints.utp.edu.my/8784/ |
| _version_ |
1738655682728558592 |
| score |
13.252575 |