A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing

• المؤلفون الرئيسيون: Ahmad, Farooq, Dennis, John Ojur, Md Khir, Mohd Haris, Hamid, Nor Hisham
• التنسيق: مقال
• منشور في: Trans Tech Publications, Switzerland 2012
• الموضوعات: TK Electrical engineering. Electronics Nuclear engineering
• الوصول للمادة أونلاين: http://eprints.utp.edu.my/8784/1/FAROOQ_%28AMR%29.pdf; http://www.scientific.net; http://eprints.utp.edu.my/8784/

This paper is about CMOS MEMS resonant magnetic field sensor in which differential electrostatic actuation, capacitive sensing, resonant frequency, quality factor and sensitivity of interdigitated comb resonator is investigated. Information is embedded in the output signal frequency because it is...