A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing

• 主要な著者: Ahmad, Farooq, Dennis, John Ojur, Md Khir, Mohd Haris, Hamid, Nor Hisham
• フォーマット: 論文
• 出版事項: Trans Tech Publications, Switzerland 2012
• 主題: TK Electrical engineering. Electronics Nuclear engineering
• オンライン･アクセス: http://eprints.utp.edu.my/8784/1/FAROOQ_%28AMR%29.pdf; http://www.scientific.net; http://eprints.utp.edu.my/8784/

This paper is about CMOS MEMS resonant magnetic field sensor in which differential electrostatic actuation, capacitive sensing, resonant frequency, quality factor and sensitivity of interdigitated comb resonator is investigated. Information is embedded in the output signal frequency because it is...