Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application

• 主要な著者: Jumril Yunas,, Burhanuddin Yeop Majlis,, Azrul Azlan Hamzah,, Badariah Bais,
• フォーマット: 論文
• 言語: English
• 出版事項: Universiti Kebangsaan Malaysia 2014
• オンライン･アクセス: http://journalarticle.ukm.my/6860/1/18_Jumril_Yunas.pdf; http://journalarticle.ukm.my/6860/; http://www.ukm.my/jsm

A comprehensive study on the SOG (Spin-on-Glass) based thin film insulating layer is presented. The SOG layer has been fabricated using simple MEMS technology which can play an important role as insulating layer of stack coupled microcoils. The fabrication process utilizes a simple, cost effective p...