Formation of thick spin-on glass (SOG) sacrificial layer for capacitive accelerometer encapsulation

• Main Authors: Hamzah, A.A., Majlis, B.Y., Ahmad, I.
• 出版: 2017
• 在線閱讀: http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5319

This paper presents a method to form thick spin-on glass (SOG) sacrificial layer for accelerometer encapsulation fabrication. Siloxane type SOG is applied on blank wafers and accelerometer patterns by multiple spin, bake, and cure processes. A series of gradual hot plate baking up to 250°C are exper...