Characterization of a MEMS-Based Humidity Sensor

• 第一著者: AMIN ALI, AHMED ABDELAZIZ
• フォーマット: Final Year Project
• 言語: English
• 出版事項: Universiti Teknologi PETRONAS 2017
• 主題: TK Electrical engineering. Electronics Nuclear engineering
• オンライン･アクセス: http://utpedia.utp.edu.my/22984/1/Dissertation-Ahmed-17713.pdf; http://utpedia.utp.edu.my/22984/

Humidity sensors are very essential in many industrial processes and household appliances. They enable system operators and control mangers to fully monitor their processes in the industry. However, these sensors are miniaturized to be in micro-scale units due the development of micromachining te...