Characterization of a MEMS-Based Humidity Sensor

• المؤلف الرئيسي: AMIN ALI, AHMED ABDELAZIZ
• التنسيق: Final Year Project
• اللغة: English
• منشور في: Universiti Teknologi PETRONAS 2017
• الموضوعات: TK Electrical engineering. Electronics Nuclear engineering
• الوصول للمادة أونلاين: http://utpedia.utp.edu.my/22984/1/Dissertation-Ahmed-17713.pdf; http://utpedia.utp.edu.my/22984/

Humidity sensors are very essential in many industrial processes and household appliances. They enable system operators and control mangers to fully monitor their processes in the industry. However, these sensors are miniaturized to be in micro-scale units due the development of micromachining te...