An alternative polymeric protection mask for bulk KOH etching of silicon

• Main Authors: Ab Rahim, Rosminazuin, Bais, Badariah, Yeop Majlis, Burhanuddin, Sugandi, Gandi
• 格式: Proceeding Paper
• 语言: English
• 出版: 2012
• 主题: TP1080 Polymers, plastics and their manufacture
• 在线阅读: http://irep.iium.edu.my/24999/1/an_alternative_polymeric.pdf; http://irep.iium.edu.my/24999/; http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6235295

The utilization of a newly developed photosensitive polymeric coating, ProTEK PSB plays a significant role in realizing simple process steps in the fabrication of MEMS devices using bulk micromachining technology. The photosensitive coating serves as an alternative to the conventional silicon n...