An alternative polymeric protection mask for bulk KOH etching of silicon
The utilization of a newly developed photosensitive polymeric coating, ProTEK PSB plays a significant role in realizing simple process steps in the fabrication of MEMS devices using bulk micromachining technology. The photosensitive coating serves as an alternative to the conventional silicon n...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2012
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/24999/1/an_alternative_polymeric.pdf http://irep.iium.edu.my/24999/ http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6235295 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|