RF CMOS-MEMS cantilever resonator

• المؤلفون الرئيسيون: Zainuddin, Ahmad Anwar, Karim, Jamilah, Nordin, Anis Nurashikin, Taufik, Mohamad Syamsi, Pandian, Mohanraj, Khan, Sheroz
• التنسيق: Conference or Workshop Item
• اللغة: English
• منشور في: 2013
• الموضوعات: TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
• الوصول للمادة أونلاين: http://irep.iium.edu.my/36871/1/06717939.pdf; http://irep.iium.edu.my/36871/; http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6717939

This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. Th...