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RF CMOS-MEMS cantilever resonator

This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. Th...

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書目詳細資料
Main Authors:	Zainuddin, Ahmad Anwar, Karim, Jamilah, Nordin, Anis Nurashikin, Taufik, Mohamad Syamsi, Pandian, Mohanraj, Khan, Sheroz
格式:	Conference or Workshop Item
語言:	English
出版:	2013
主題:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
在線閱讀:	http://irep.iium.edu.my/36871/1/06717939.pdf http://irep.iium.edu.my/36871/ http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6717939
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