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A study on controllable aluminium doped zinc oxide patterning by chemical etching for MEMS application

This present work reports on the study of controllable aluminium doped zinc oxide (AZO) patterning by chemical etching for MEMS application. The AZO thin film was prepared by RF magnetron sputtering as it is capable of producing uniform thin film at high deposition rates. X-Ray diffraction (XRD) and...

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Main Authors:	Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, A. Malik, Noreha, Othman, Raihan, Alam, A. H. M. Zahirul, Khan, Sheroz, Mortada, Ossama, Crunteanu, Aurelian, Chatras, Matthieu, Orlianges, Jean Christophe, Blondy, Pierre
格式:	Article
语言:	English English English
出版:	Springer Berlin Heidelberg 2017
主题:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
在线阅读:	http://irep.iium.edu.my/49259/1/Microsystems_2016.pdf http://irep.iium.edu.my/49259/9/49259_A%20study%20on%20controllable%20aluminium_scopus.pdf http://irep.iium.edu.my/49259/14/49259_A%20study%20on%20controllable%20aluminium%20doped_article.pdf http://irep.iium.edu.my/49259/ http://link.springer.com/article/10.1007%2Fs00542-015-2783-1
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