A CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass

• 主要な著者: Md Khir, Mohd Haris, Qu, Hongwei
• フォーマット: Conference or Workshop Item
• 出版事項: 2010
• 主題: TK Electrical engineering. Electronics Nuclear engineering
• オンライン･アクセス: http://eprints.utp.edu.my/3451/1/A_CMOS-MEMS_Piezoresistive_Accelerometer_with_Large_Proof_Mass.pdf; http://eprints.utp.edu.my/3451/

This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. Inherent CMOS polysilicon thin film was utilized as piezoresistive material and full Wheatstone bridge was constructed through easy wiring allowed by three metal layers in CMOS thin films. T...