A CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass

• المؤلفون الرئيسيون: Md Khir, Mohd Haris, Qu, Hongwei
• التنسيق: Conference or Workshop Item
• منشور في: 2010
• الموضوعات: TK Electrical engineering. Electronics Nuclear engineering
• الوصول للمادة أونلاين: http://eprints.utp.edu.my/3451/1/A_CMOS-MEMS_Piezoresistive_Accelerometer_with_Large_Proof_Mass.pdf; http://eprints.utp.edu.my/3451/

This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. Inherent CMOS polysilicon thin film was utilized as piezoresistive material and full Wheatstone bridge was constructed through easy wiring allowed by three metal layers in CMOS thin films. T...