Analytical Modeling of Plus Shape MEMS Paddle Bridge Resonant Sensor for Weak Magnetic Fields
In this paper, we present an analytical model of novel plus shape MEMS paddle bridge resonant sensor to estimate electromechanical behavior, damping, electrostatic actuation and capacitive detection. The analytical model is derived using the Reynold's method for squeeze film and Rayleigh meth...
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| Main Authors: | , , , |
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| 格式: | Article |
| 出版: |
IEEE
2011
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| 在线阅读: | http://eprints.utp.edu.my/7172/1/stamp.jsp%3Ftp%3D%26arnumber%3D6088350%26tag%3D1 http://ieeexplore.ieee.org http://eprints.utp.edu.my/7172/ |
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