Analytical Modeling of Plus Shape MEMS Paddle Bridge Resonant Sensor for Weak Magnetic Fields

• المؤلفون الرئيسيون: Ahmad,, Farooq, Md Khir, Mohd Haris, Hamid, Nor Hisham, Dennis, John Ojur
• التنسيق: مقال
• منشور في: IEEE 2011
• الموضوعات: TK Electrical engineering. Electronics Nuclear engineering
• الوصول للمادة أونلاين: http://eprints.utp.edu.my/7172/1/stamp.jsp%3Ftp%3D%26arnumber%3D6088350%26tag%3D1; http://ieeexplore.ieee.org; http://eprints.utp.edu.my/7172/

In this paper, we present an analytical model of novel plus shape MEMS paddle bridge resonant sensor to estimate electromechanical behavior, damping, electrostatic actuation and capacitive detection. The analytical model is derived using the Reynold's method for squeeze film and Rayleigh meth...