Analytical Modeling of Plus Shape MEMS Paddle Bridge Resonant Sensor for Weak Magnetic Fields

• Main Authors: Ahmad,, Farooq, Md Khir, Mohd Haris, Hamid, Nor Hisham, Dennis, John Ojur
• 格式: Article
• 出版: IEEE 2011
• 主題: TK Electrical engineering. Electronics Nuclear engineering
• 在線閱讀: http://eprints.utp.edu.my/7172/1/stamp.jsp%3Ftp%3D%26arnumber%3D6088350%26tag%3D1; http://ieeexplore.ieee.org; http://eprints.utp.edu.my/7172/

In this paper, we present an analytical model of novel plus shape MEMS paddle bridge resonant sensor to estimate electromechanical behavior, damping, electrostatic actuation and capacitive detection. The analytical model is derived using the Reynold's method for squeeze film and Rayleigh meth...