A low-cost CMOS-MEMS Piezoresistive Accelerometer With Large Proof Mass

• المؤلفون الرئيسيون: Md Khir, Mohd Haris, Qu, Hongwei, Qu, Peng
• التنسيق: مقال
• منشور في: MDPI 2011
• الموضوعات: TK Electrical engineering. Electronics Nuclear engineering
• الوصول للمادة أونلاين: http://eprints.utp.edu.my/7232/1/sensors-9549-publish.pdf; http://www.mdpi.com/journal/sensors/; http://eprints.utp.edu.my/7232/

This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive sensing material. A full Wheatstone bridge wa...