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A low-cost CMOS-MEMS Piezoresistive Accelerometer With Large Proof Mass

This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive sensing material. A full Wheatstone bridge wa...

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Main Authors:	Md Khir, Mohd Haris, Qu, Hongwei, Qu, Peng
格式:	Article
出版:	MDPI 2011
主题:	TK Electrical engineering. Electronics Nuclear engineering
在线阅读:	http://eprints.utp.edu.my/7232/1/sensors-9549-publish.pdf http://www.mdpi.com/journal/sensors/ http://eprints.utp.edu.my/7232/
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