A low-cost CMOS-MEMS Piezoresistive Accelerometer With Large Proof Mass

• 主要な著者: Md Khir, Mohd Haris, Qu, Hongwei, Qu, Peng
• フォーマット: 論文
• 出版事項: MDPI 2011
• 主題: TK Electrical engineering. Electronics Nuclear engineering
• オンライン･アクセス: http://eprints.utp.edu.my/7232/1/sensors-9549-publish.pdf; http://www.mdpi.com/journal/sensors/; http://eprints.utp.edu.my/7232/

This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive sensing material. A full Wheatstone bridge wa...