A low-cost CMOS-MEMS Piezoresistive Accelerometer With Large Proof Mass

This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive sensing material. A full Wheatstone bridge wa...

全面介绍

Saved in:
书目详细资料
Main Authors: Md Khir, Mohd Haris, Qu, Hongwei, Qu, Peng
格式: Article
出版: MDPI 2011
主题:
在线阅读:http://eprints.utp.edu.my/7232/1/sensors-9549-publish.pdf
http://www.mdpi.com/journal/sensors/
http://eprints.utp.edu.my/7232/
标签: 添加标签
没有标签, 成为第一个标记此记录!