Application of micro-electro-mechanical systems (MEMS) as sensors: A review
This paper presents a review of the current applications of Micro-Electro-Mechanical Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as actuators or sensors in numerous respects of our daily life as well as automation lines and industrial applications. Intersection o...
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| 主要な著者: | , , |
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| フォーマット: | 論文 |
| 言語: | English |
| 出版事項: |
Fuji Technology Press
2020
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| 主題: | |
| オンライン･アクセス: | http://eprints.utm.my/id/eprint/92360/1/AhmadAthifMohdFaudzi2020_ApplicationofMicroElectroMechanicalSystems.pdf http://eprints.utm.my/id/eprint/92360/ http://dx.doi.org/10.20965/jrm.2020.p0281 |
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