Application of micro-electro-mechanical systems (MEMS) as sensors: A review

• Main Authors: Mohd. Faudzi, Ahmad Athif, Sabzehmeidani, Yaser, Koichi, Suzumori
• 格式: Article
• 語言: English
• 出版: Fuji Technology Press 2020
• 主題: TK Electrical engineering. Electronics Nuclear engineering
• 在線閱讀: http://eprints.utm.my/id/eprint/92360/1/AhmadAthifMohdFaudzi2020_ApplicationofMicroElectroMechanicalSystems.pdf; http://eprints.utm.my/id/eprint/92360/; http://dx.doi.org/10.20965/jrm.2020.p0281

This paper presents a review of the current applications of Micro-Electro-Mechanical Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as actuators or sensors in numerous respects of our daily life as well as automation lines and industrial applications. Intersection o...