Application of micro-electro-mechanical systems (MEMS) as sensors: A review
This paper presents a review of the current applications of Micro-Electro-Mechanical Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as actuators or sensors in numerous respects of our daily life as well as automation lines and industrial applications. Intersection o...
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| 主要な著者: | , , |
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| フォーマット: | 論文 |
| 言語: | English |
| 出版事項: |
Fuji Technology Press
2020
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| 主題: | |
| オンライン･アクセス: | http://eprints.utm.my/id/eprint/92360/1/AhmadAthifMohdFaudzi2020_ApplicationofMicroElectroMechanicalSystems.pdf http://eprints.utm.my/id/eprint/92360/ http://dx.doi.org/10.20965/jrm.2020.p0281 |
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| 要約: | This paper presents a review of the current applications of Micro-Electro-Mechanical Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as actuators or sensors in numerous respects of our daily life as well as automation lines and industrial applications. Intersection of founding new polymers and composites such as silicon and micro manufacturing technologies performing micro-machining and micro-assembly brings about re-markable growth of application and efficacy of MEMS devices. MEMS indicated huge improvement in size reduction, higher reliability, multi-functionality, cus-tomized design, and power usage. Demonstration of various devices and technologies utilized in robotics and industrial applications are illustrated in this article along with the use and the role of silicon in the development of the sensors. Some future trends and its perspectives are also discussed. |
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