Application of micro-electro-mechanical systems (MEMS) as sensors: A review

• المؤلفون الرئيسيون: Mohd. Faudzi, Ahmad Athif, Sabzehmeidani, Yaser, Koichi, Suzumori
• التنسيق: مقال
• اللغة: English
• منشور في: Fuji Technology Press 2020
• الموضوعات: TK Electrical engineering. Electronics Nuclear engineering
• الوصول للمادة أونلاين: http://eprints.utm.my/id/eprint/92360/1/AhmadAthifMohdFaudzi2020_ApplicationofMicroElectroMechanicalSystems.pdf; http://eprints.utm.my/id/eprint/92360/; http://dx.doi.org/10.20965/jrm.2020.p0281

This paper presents a review of the current applications of Micro-Electro-Mechanical Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as actuators or sensors in numerous respects of our daily life as well as automation lines and industrial applications. Intersection o...