Design, modeling and simulation of CMOS MEMS cantilever for carbon dioxide gas sensing

• المؤلفون الرئيسيون: Mirza,, Asif, Md Khir, Mohd Haris, Dennis , John Ojur, Ashraf, Khalid, Hamid, Nor Hisham
• التنسيق: مقال
• منشور في: IEEE Xplore 2011
• الموضوعات: TK Electrical engineering. Electronics Nuclear engineering
• الوصول للمادة أونلاين: http://eprints.utp.edu.my/7174/1/stamp.jsp%3Ftp%3D%26arnumber%3D6088353%26tag%3D1; http://ieeexplore.ieee.org; http://eprints.utp.edu.my/7174/

Carbon dioxide sensors have potential applications in medical diagnoses, health care, environmental monitoring, food and medicine industry. In recent years, many novel biological, physical and chemical sensors have employed microcantilevers due to their simplicity, ease of fabrication and integratio...