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Design, modeling and simulation of CMOS MEMS cantilever for carbon dioxide gas sensing

Carbon dioxide sensors have potential applications in medical diagnoses, health care, environmental monitoring, food and medicine industry. In recent years, many novel biological, physical and chemical sensors have employed microcantilevers due to their simplicity, ease of fabrication and integratio...

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Main Authors:	Mirza,, Asif, Md Khir, Mohd Haris, Dennis , John Ojur, Ashraf, Khalid, Hamid, Nor Hisham
格式:	Article
出版:	IEEE Xplore 2011
主题:	TK Electrical engineering. Electronics Nuclear engineering
在线阅读:	http://eprints.utp.edu.my/7174/1/stamp.jsp%3Ftp%3D%26arnumber%3D6088353%26tag%3D1 http://ieeexplore.ieee.org http://eprints.utp.edu.my/7174/
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