Design, modeling and simulation of CMOS MEMS cantilever for carbon dioxide gas sensing

• 主要な著者: Mirza,, Asif, Md Khir, Mohd Haris, Dennis , John Ojur, Ashraf, Khalid, Hamid, Nor Hisham
• フォーマット: 論文
• 出版事項: IEEE Xplore 2011
• 主題: TK Electrical engineering. Electronics Nuclear engineering
• オンライン･アクセス: http://eprints.utp.edu.my/7174/1/stamp.jsp%3Ftp%3D%26arnumber%3D6088353%26tag%3D1; http://ieeexplore.ieee.org; http://eprints.utp.edu.my/7174/

Carbon dioxide sensors have potential applications in medical diagnoses, health care, environmental monitoring, food and medicine industry. In recent years, many novel biological, physical and chemical sensors have employed microcantilevers due to their simplicity, ease of fabrication and integratio...