Modeling and Microfabrication of a CMOS Resonator for Magnetic Field Measurement

• 主要な著者: Dennis , John Ojur, Ahmad, Farooq, Md Khir, Mohd Haris, Hamid, Nor Hisham
• フォーマット: Conference or Workshop Item
• 出版事項: 2012
• 主題: TK Electrical engineering. Electronics Nuclear engineering
• オンライン･アクセス: http://ieeexplore.ieee.org; http://eprints.utp.edu.my/8798/

This paper presents the modeling and microfabrication of a CMOS resonant magnetic field sensor capable of measuring magnetic field in the range of nanotesla. This sensor is based on differential electrostatic along with Lorentz force actuation and piezoresistive sensing. Cadence virtuoso layout...