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Modeling and Microfabrication of a CMOS Resonator for Magnetic Field Measurement

This paper presents the modeling and microfabrication of a CMOS resonant magnetic field sensor capable of measuring magnetic field in the range of nanotesla. This sensor is based on differential electrostatic along with Lorentz force actuation and piezoresistive sensing. Cadence virtuoso layout...

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書目詳細資料
Main Authors:	Dennis , John Ojur, Ahmad, Farooq, Md Khir, Mohd Haris, Hamid, Nor Hisham
格式:	Conference or Workshop Item
出版:	2012
主題:	TK Electrical engineering. Electronics Nuclear engineering
在線閱讀:	http://ieeexplore.ieee.org http://eprints.utp.edu.my/8798/
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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